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measuring vibration in a clean room

Description:

I'm using accelerometers to measure the displacement caused by low frequency vibrations in a computer chip plant. In order to enter the clean room, I had to put on the "bunny suit," walk through an air shower chamber, step on an adhesive mat, and pass through security. The room where the photoresists of the chips are made with an electron beam had tolerances of less than one tenth of one degree and less than one part in one million of dust in the air.